Inductively Coupled Plasma Etching of Complementary Barrier Infrared Detector Focal Plane Arrays for Long-Wave Infrared Imaging

IEEE Photon. Tech. Lett., Volume 24, Issue 18

Co-authors: A. Soibel, S.B. Rafol, A. Khoskhlagh, J.K. Liu, J.M. Mumolo, L. Hoeglund, S.A. Keo, D.Z.-Y. Ting, and S.D. Gunapala.



Unsolicited e-mails and information sent to Morrison & Foerster will not be considered confidential, may be disclosed to others pursuant to our Privacy Policy, may not receive a response, and do not create an attorney-client relationship with Morrison & Foerster. If you are not already a client of Morrison & Foerster, do not include any confidential information in this message. Also, please note that our attorneys do not seek to practice law in any jurisdiction in which they are not properly authorized to do so.